11/15/2012	10:16:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	10:16:36 AM	Recipe started at 10:16 AM
11/15/2012	10:16:36 AM	Helium valve closed
11/15/2012	10:16:36 AM	H2 valve closed
11/15/2012	10:16:36 AM	BCl3 valve closed
11/15/2012	10:16:36 AM	PH3 valve closed
11/15/2012	10:16:36 AM	SiCl4 pre valve closed
11/15/2012	10:16:36 AM	SiCl4 post valve closed
11/15/2012	10:16:36 AM	Main Vac valve closed
11/15/2012	10:16:36 AM	Bypass valve closed
11/15/2012	10:16:36 AM	Bubbler valve closed
11/15/2012	10:16:36 AM	Helium MFC set to  0.000000
11/15/2012	10:16:36 AM	H2 MFC set to  0.000000
11/15/2012	10:16:36 AM	BCl3 MFC set to  0.000000
11/15/2012	10:16:36 AM	PH3 MFC set to  0.000000
11/15/2012	10:16:36 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:16:36 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:16:36 AM	Tube furnace set to 0
11/15/2012	10:16:39 AM	H2 valve closed
11/15/2012	10:16:39 AM	BCl3 valve closed
11/15/2012	10:16:39 AM	PH3 valve closed
11/15/2012	10:16:39 AM	SiCl4 pre valve closed
11/15/2012	10:16:39 AM	SiCl4 post valve closed
11/15/2012	10:16:39 AM	Main Vac valve closed
11/15/2012	10:16:39 AM	Bypass valve closed
11/15/2012	10:16:39 AM	Bubbler valve closed
11/15/2012	10:16:39 AM	Helium valve opened
11/15/2012	10:16:39 AM	Helium MFC set to  500.000000
11/15/2012	10:16:39 AM	H2 MFC set to  0.000000
11/15/2012	10:16:39 AM	BCl3 MFC set to  0.000000
11/15/2012	10:16:39 AM	PH3 MFC set to  0.000000
11/15/2012	10:16:39 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:16:39 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:16:39 AM	Tube furnace set to 0
11/15/2012	10:17:52 AM	Helium valve closed
11/15/2012	10:17:52 AM	H2 valve closed
11/15/2012	10:17:52 AM	BCl3 valve closed
11/15/2012	10:17:52 AM	PH3 valve closed
11/15/2012	10:17:52 AM	SiCl4 pre valve closed
11/15/2012	10:17:52 AM	SiCl4 post valve closed
11/15/2012	10:17:52 AM	Main Vac valve closed
11/15/2012	10:17:52 AM	Bypass valve closed
11/15/2012	10:17:52 AM	Bubbler valve closed
11/15/2012	10:17:52 AM	Helium MFC set to  0.000000
11/15/2012	10:17:52 AM	H2 MFC set to  0.000000
11/15/2012	10:17:52 AM	BCl3 MFC set to  0.000000
11/15/2012	10:17:52 AM	PH3 MFC set to  0.000000
11/15/2012	10:17:52 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:17:52 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:17:53 AM	Tube furnace set to 0
11/15/2012	10:17:54 AM	Run finished at 10:17 AM
11/15/2012	10:17:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	10:24:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	10:24:25 AM	Recipe started at 10:24 AM
11/15/2012	10:24:25 AM	Helium valve closed
11/15/2012	10:24:25 AM	H2 valve closed
11/15/2012	10:24:25 AM	BCl3 valve closed
11/15/2012	10:24:25 AM	PH3 valve closed
11/15/2012	10:24:25 AM	SiCl4 pre valve closed
11/15/2012	10:24:25 AM	SiCl4 post valve closed
11/15/2012	10:24:25 AM	Main Vac valve closed
11/15/2012	10:24:25 AM	Bubbler valve closed
11/15/2012	10:24:25 AM	Bypass valve opened
11/15/2012	10:24:25 AM	Helium MFC set to  0.000000
11/15/2012	10:24:25 AM	H2 MFC set to  0.000000
11/15/2012	10:24:25 AM	BCl3 MFC set to  0.000000
11/15/2012	10:24:25 AM	PH3 MFC set to  0.000000
11/15/2012	10:24:25 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:24:25 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:24:25 AM	Tube furnace set to 0
11/15/2012	10:25:35 AM	Helium valve closed
11/15/2012	10:25:35 AM	H2 valve closed
11/15/2012	10:25:35 AM	BCl3 valve closed
11/15/2012	10:25:35 AM	PH3 valve closed
11/15/2012	10:25:35 AM	SiCl4 pre valve closed
11/15/2012	10:25:35 AM	SiCl4 post valve closed
11/15/2012	10:25:35 AM	Main Vac valve closed
11/15/2012	10:25:35 AM	Bubbler valve closed
11/15/2012	10:25:35 AM	Bypass valve opened
11/15/2012	10:25:35 AM	Helium MFC set to  0.000000
11/15/2012	10:25:35 AM	H2 MFC set to  0.000000
11/15/2012	10:25:35 AM	BCl3 MFC set to  0.000000
11/15/2012	10:25:35 AM	PH3 MFC set to  0.000000
11/15/2012	10:25:35 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:25:35 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:25:35 AM	Tube furnace set to 0
11/15/2012	10:26:35 AM	Helium valve closed
11/15/2012	10:26:35 AM	H2 valve closed
11/15/2012	10:26:35 AM	BCl3 valve closed
11/15/2012	10:26:35 AM	PH3 valve closed
11/15/2012	10:26:35 AM	SiCl4 pre valve closed
11/15/2012	10:26:35 AM	SiCl4 post valve closed
11/15/2012	10:26:35 AM	Bypass valve closed
11/15/2012	10:26:35 AM	Bubbler valve closed
11/15/2012	10:26:35 AM	Main Vac valve opened
11/15/2012	10:26:35 AM	Helium MFC set to  0.000000
11/15/2012	10:26:35 AM	H2 MFC set to  0.000000
11/15/2012	10:26:35 AM	BCl3 MFC set to  0.000000
11/15/2012	10:26:35 AM	PH3 MFC set to  0.000000
11/15/2012	10:26:35 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:26:35 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:26:36 AM	Tube furnace set to 0
11/15/2012	10:26:37 AM	Run finished at 10:26 AM
11/15/2012	10:26:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	10:27:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/15/2012	10:27:21 AM	Recipe started at 10:27 AM
11/15/2012	10:27:21 AM	Helium valve closed
11/15/2012	10:27:21 AM	H2 valve closed
11/15/2012	10:27:21 AM	BCl3 valve closed
11/15/2012	10:27:21 AM	PH3 valve closed
11/15/2012	10:27:21 AM	SiCl4 pre valve closed
11/15/2012	10:27:21 AM	SiCl4 post valve closed
11/15/2012	10:27:21 AM	Main Vac valve closed
11/15/2012	10:27:21 AM	Bubbler valve closed
11/15/2012	10:27:21 AM	Bypass valve opened
11/15/2012	10:27:21 AM	Helium MFC set to  0.000000
11/15/2012	10:27:21 AM	H2 MFC set to  0.000000
11/15/2012	10:27:21 AM	BCl3 MFC set to  0.000000
11/15/2012	10:27:21 AM	PH3 MFC set to  0.000000
11/15/2012	10:27:21 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:27:21 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:27:21 AM	Tube furnace set to 0
11/15/2012	10:27:22 AM	Helium valve closed
11/15/2012	10:27:22 AM	H2 valve closed
11/15/2012	10:27:22 AM	BCl3 valve closed
11/15/2012	10:27:22 AM	PH3 valve closed
11/15/2012	10:27:22 AM	SiCl4 pre valve closed
11/15/2012	10:27:22 AM	SiCl4 post valve closed
11/15/2012	10:27:22 AM	Main Vac valve closed
11/15/2012	10:27:22 AM	Bubbler valve closed
11/15/2012	10:27:22 AM	Bypass valve opened
11/15/2012	10:27:22 AM	Helium MFC set to  0.000000
11/15/2012	10:27:22 AM	H2 MFC set to  0.000000
11/15/2012	10:27:22 AM	BCl3 MFC set to  0.000000
11/15/2012	10:27:22 AM	PH3 MFC set to  0.000000
11/15/2012	10:27:22 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:27:22 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:27:22 AM	Tube furnace set to 0
11/15/2012	10:27:52 AM	Helium valve closed
11/15/2012	10:27:52 AM	H2 valve closed
11/15/2012	10:27:52 AM	BCl3 valve closed
11/15/2012	10:27:52 AM	PH3 valve closed
11/15/2012	10:27:52 AM	SiCl4 pre valve closed
11/15/2012	10:27:52 AM	SiCl4 post valve closed
11/15/2012	10:27:52 AM	Bypass valve closed
11/15/2012	10:27:52 AM	Bubbler valve closed
11/15/2012	10:27:52 AM	Main Vac valve opened
11/15/2012	10:27:52 AM	Helium MFC set to  0.000000
11/15/2012	10:27:52 AM	H2 MFC set to  0.000000
11/15/2012	10:27:52 AM	BCl3 MFC set to  0.000000
11/15/2012	10:27:52 AM	PH3 MFC set to  0.000000
11/15/2012	10:27:52 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:27:52 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:27:52 AM	Tube furnace set to 0
11/15/2012	10:28:22 AM	H2 valve closed
11/15/2012	10:28:22 AM	BCl3 valve closed
11/15/2012	10:28:22 AM	PH3 valve closed
11/15/2012	10:28:22 AM	SiCl4 pre valve closed
11/15/2012	10:28:22 AM	SiCl4 post valve closed
11/15/2012	10:28:22 AM	Bypass valve closed
11/15/2012	10:28:22 AM	Bubbler valve closed
11/15/2012	10:28:22 AM	Helium valve opened
11/15/2012	10:28:22 AM	Main Vac valve opened
11/15/2012	10:28:22 AM	Helium MFC set to  20.000000
11/15/2012	10:28:22 AM	H2 MFC set to  0.000000
11/15/2012	10:28:22 AM	BCl3 MFC set to  0.000000
11/15/2012	10:28:22 AM	PH3 MFC set to  0.000000
11/15/2012	10:28:22 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:28:22 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:28:22 AM	Tube furnace set to 0
11/15/2012	10:28:52 AM	Helium valve closed
11/15/2012	10:28:52 AM	H2 valve closed
11/15/2012	10:28:52 AM	BCl3 valve closed
11/15/2012	10:28:52 AM	PH3 valve closed
11/15/2012	10:28:52 AM	SiCl4 pre valve closed
11/15/2012	10:28:52 AM	SiCl4 post valve closed
11/15/2012	10:28:52 AM	Bypass valve closed
11/15/2012	10:28:52 AM	Bubbler valve closed
11/15/2012	10:28:52 AM	Main Vac valve opened
11/15/2012	10:28:52 AM	Helium MFC set to  0.000000
11/15/2012	10:28:52 AM	H2 MFC set to  0.000000
11/15/2012	10:28:52 AM	BCl3 MFC set to  0.000000
11/15/2012	10:28:52 AM	PH3 MFC set to  0.000000
11/15/2012	10:28:52 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:28:52 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:28:53 AM	Tube furnace set to 0
11/15/2012	10:29:23 AM	H2 valve closed
11/15/2012	10:29:23 AM	BCl3 valve closed
11/15/2012	10:29:23 AM	PH3 valve closed
11/15/2012	10:29:23 AM	SiCl4 pre valve closed
11/15/2012	10:29:23 AM	SiCl4 post valve closed
11/15/2012	10:29:23 AM	Bypass valve closed
11/15/2012	10:29:23 AM	Bubbler valve closed
11/15/2012	10:29:23 AM	Helium valve opened
11/15/2012	10:29:23 AM	Main Vac valve opened
11/15/2012	10:29:23 AM	Helium MFC set to  20.000000
11/15/2012	10:29:23 AM	H2 MFC set to  0.000000
11/15/2012	10:29:23 AM	BCl3 MFC set to  0.000000
11/15/2012	10:29:23 AM	PH3 MFC set to  0.000000
11/15/2012	10:29:23 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:29:23 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:29:23 AM	Tube furnace set to 0
11/15/2012	10:29:53 AM	Helium valve closed
11/15/2012	10:29:53 AM	H2 valve closed
11/15/2012	10:29:53 AM	BCl3 valve closed
11/15/2012	10:29:53 AM	PH3 valve closed
11/15/2012	10:29:53 AM	SiCl4 pre valve closed
11/15/2012	10:29:53 AM	SiCl4 post valve closed
11/15/2012	10:29:53 AM	Bypass valve closed
11/15/2012	10:29:53 AM	Bubbler valve closed
11/15/2012	10:29:53 AM	Main Vac valve opened
11/15/2012	10:29:53 AM	Helium MFC set to  0.000000
11/15/2012	10:29:53 AM	H2 MFC set to  0.000000
11/15/2012	10:29:53 AM	BCl3 MFC set to  0.000000
11/15/2012	10:29:53 AM	PH3 MFC set to  0.000000
11/15/2012	10:29:53 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:29:53 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:29:53 AM	Tube furnace set to 0
11/15/2012	10:30:23 AM	H2 valve closed
11/15/2012	10:30:23 AM	BCl3 valve closed
11/15/2012	10:30:23 AM	PH3 valve closed
11/15/2012	10:30:23 AM	SiCl4 pre valve closed
11/15/2012	10:30:23 AM	SiCl4 post valve closed
11/15/2012	10:30:23 AM	Bypass valve closed
11/15/2012	10:30:23 AM	Bubbler valve closed
11/15/2012	10:30:23 AM	Helium valve opened
11/15/2012	10:30:23 AM	Main Vac valve opened
11/15/2012	10:30:23 AM	Helium MFC set to  20.000000
11/15/2012	10:30:23 AM	H2 MFC set to  0.000000
11/15/2012	10:30:23 AM	BCl3 MFC set to  0.000000
11/15/2012	10:30:23 AM	PH3 MFC set to  0.000000
11/15/2012	10:30:23 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:30:23 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:30:23 AM	Tube furnace set to 0
11/15/2012	10:30:53 AM	Helium valve closed
11/15/2012	10:30:53 AM	H2 valve closed
11/15/2012	10:30:53 AM	BCl3 valve closed
11/15/2012	10:30:53 AM	PH3 valve closed
11/15/2012	10:30:53 AM	SiCl4 pre valve closed
11/15/2012	10:30:53 AM	SiCl4 post valve closed
11/15/2012	10:30:53 AM	Bypass valve closed
11/15/2012	10:30:53 AM	Bubbler valve closed
11/15/2012	10:30:53 AM	Main Vac valve opened
11/15/2012	10:30:53 AM	Helium MFC set to  0.000000
11/15/2012	10:30:53 AM	H2 MFC set to  0.000000
11/15/2012	10:30:53 AM	BCl3 MFC set to  0.000000
11/15/2012	10:30:53 AM	PH3 MFC set to  0.000000
11/15/2012	10:30:53 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:30:53 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:30:54 AM	Tube furnace set to 0
11/15/2012	10:31:24 AM	H2 valve closed
11/15/2012	10:31:24 AM	BCl3 valve closed
11/15/2012	10:31:24 AM	PH3 valve closed
11/15/2012	10:31:24 AM	SiCl4 pre valve closed
11/15/2012	10:31:24 AM	SiCl4 post valve closed
11/15/2012	10:31:24 AM	Bypass valve closed
11/15/2012	10:31:24 AM	Bubbler valve closed
11/15/2012	10:31:24 AM	Helium valve opened
11/15/2012	10:31:24 AM	Main Vac valve opened
11/15/2012	10:31:24 AM	Helium MFC set to  20.000000
11/15/2012	10:31:24 AM	H2 MFC set to  0.000000
11/15/2012	10:31:24 AM	BCl3 MFC set to  0.000000
11/15/2012	10:31:24 AM	PH3 MFC set to  0.000000
11/15/2012	10:31:24 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:31:24 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:31:24 AM	Tube furnace set to 0
11/15/2012	10:31:54 AM	Helium valve closed
11/15/2012	10:31:54 AM	H2 valve closed
11/15/2012	10:31:54 AM	BCl3 valve closed
11/15/2012	10:31:54 AM	PH3 valve closed
11/15/2012	10:31:54 AM	SiCl4 pre valve closed
11/15/2012	10:31:54 AM	SiCl4 post valve closed
11/15/2012	10:31:54 AM	Bypass valve closed
11/15/2012	10:31:54 AM	Bubbler valve closed
11/15/2012	10:31:54 AM	Main Vac valve opened
11/15/2012	10:31:54 AM	Helium MFC set to  0.000000
11/15/2012	10:31:54 AM	H2 MFC set to  0.000000
11/15/2012	10:31:54 AM	BCl3 MFC set to  0.000000
11/15/2012	10:31:54 AM	PH3 MFC set to  0.000000
11/15/2012	10:31:54 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:31:54 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:31:54 AM	Tube furnace set to 0
11/15/2012	10:32:24 AM	H2 valve closed
11/15/2012	10:32:24 AM	BCl3 valve closed
11/15/2012	10:32:24 AM	PH3 valve closed
11/15/2012	10:32:24 AM	SiCl4 pre valve closed
11/15/2012	10:32:24 AM	SiCl4 post valve closed
11/15/2012	10:32:24 AM	Bypass valve closed
11/15/2012	10:32:24 AM	Bubbler valve closed
11/15/2012	10:32:24 AM	Helium valve opened
11/15/2012	10:32:24 AM	Main Vac valve opened
11/15/2012	10:32:24 AM	Helium MFC set to  20.000000
11/15/2012	10:32:24 AM	H2 MFC set to  0.000000
11/15/2012	10:32:24 AM	BCl3 MFC set to  0.000000
11/15/2012	10:32:24 AM	PH3 MFC set to  0.000000
11/15/2012	10:32:24 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:32:24 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:32:24 AM	Tube furnace set to 0
11/15/2012	10:32:54 AM	Helium valve closed
11/15/2012	10:32:54 AM	H2 valve closed
11/15/2012	10:32:54 AM	BCl3 valve closed
11/15/2012	10:32:54 AM	PH3 valve closed
11/15/2012	10:32:54 AM	SiCl4 pre valve closed
11/15/2012	10:32:54 AM	SiCl4 post valve closed
11/15/2012	10:32:54 AM	Bypass valve closed
11/15/2012	10:32:54 AM	Bubbler valve closed
11/15/2012	10:32:54 AM	Main Vac valve opened
11/15/2012	10:32:54 AM	Helium MFC set to  0.000000
11/15/2012	10:32:54 AM	H2 MFC set to  0.000000
11/15/2012	10:32:54 AM	BCl3 MFC set to  0.000000
11/15/2012	10:32:54 AM	PH3 MFC set to  0.000000
11/15/2012	10:32:54 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:32:54 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:32:55 AM	Tube furnace set to 0
11/15/2012	10:33:11 AM	Run aborted at 10:33 AM
11/15/2012	10:33:11 AM	Helium valve closed
11/15/2012	10:33:11 AM	H2 valve closed
11/15/2012	10:33:11 AM	BCl3 valve closed
11/15/2012	10:33:11 AM	PH3 valve closed
11/15/2012	10:33:11 AM	SiCl4 pre valve closed
11/15/2012	10:33:11 AM	SiCl4 post valve closed
11/15/2012	10:33:11 AM	Bypass valve closed
11/15/2012	10:33:11 AM	Main Vac valve closed
11/15/2012	10:33:11 AM	Bubbler valve closed
11/15/2012	10:33:11 AM	Helium MFC set to  0.000000
11/15/2012	10:33:11 AM	H2 MFC set to  0.000000
11/15/2012	10:33:11 AM	BCl3 MFC set to  0.000000
11/15/2012	10:33:11 AM	PH3 MFC set to  0.000000
11/15/2012	10:33:11 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:33:11 AM	Tube furnace set to 0
11/15/2012	10:33:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/15/2012	10:33:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	10:33:18 AM	Recipe started at 10:33 AM
11/15/2012	10:33:18 AM	Helium valve closed
11/15/2012	10:33:18 AM	H2 valve closed
11/15/2012	10:33:18 AM	BCl3 valve closed
11/15/2012	10:33:18 AM	PH3 valve closed
11/15/2012	10:33:18 AM	SiCl4 pre valve closed
11/15/2012	10:33:18 AM	SiCl4 post valve closed
11/15/2012	10:33:18 AM	Main Vac valve closed
11/15/2012	10:33:18 AM	Bypass valve closed
11/15/2012	10:33:18 AM	Bubbler valve closed
11/15/2012	10:33:18 AM	Helium MFC set to  0.000000
11/15/2012	10:33:18 AM	H2 MFC set to  0.000000
11/15/2012	10:33:18 AM	BCl3 MFC set to  0.000000
11/15/2012	10:33:18 AM	PH3 MFC set to  0.000000
11/15/2012	10:33:18 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:33:18 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:33:18 AM	Tube furnace set to 0
11/15/2012	10:33:21 AM	H2 valve closed
11/15/2012	10:33:21 AM	BCl3 valve closed
11/15/2012	10:33:21 AM	PH3 valve closed
11/15/2012	10:33:21 AM	SiCl4 pre valve closed
11/15/2012	10:33:21 AM	SiCl4 post valve closed
11/15/2012	10:33:21 AM	Main Vac valve closed
11/15/2012	10:33:21 AM	Bypass valve closed
11/15/2012	10:33:21 AM	Bubbler valve closed
11/15/2012	10:33:21 AM	Helium valve opened
11/15/2012	10:33:21 AM	Helium MFC set to  500.000000
11/15/2012	10:33:21 AM	H2 MFC set to  0.000000
11/15/2012	10:33:21 AM	BCl3 MFC set to  0.000000
11/15/2012	10:33:21 AM	PH3 MFC set to  0.000000
11/15/2012	10:33:21 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:33:21 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:33:21 AM	Tube furnace set to 0
11/15/2012	10:34:35 AM	Helium valve closed
11/15/2012	10:34:35 AM	H2 valve closed
11/15/2012	10:34:35 AM	BCl3 valve closed
11/15/2012	10:34:35 AM	PH3 valve closed
11/15/2012	10:34:35 AM	SiCl4 pre valve closed
11/15/2012	10:34:35 AM	SiCl4 post valve closed
11/15/2012	10:34:35 AM	Main Vac valve closed
11/15/2012	10:34:35 AM	Bypass valve closed
11/15/2012	10:34:35 AM	Bubbler valve closed
11/15/2012	10:34:35 AM	Helium MFC set to  0.000000
11/15/2012	10:34:35 AM	H2 MFC set to  0.000000
11/15/2012	10:34:35 AM	BCl3 MFC set to  0.000000
11/15/2012	10:34:35 AM	PH3 MFC set to  0.000000
11/15/2012	10:34:35 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:34:35 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:34:35 AM	Tube furnace set to 0
11/15/2012	10:34:36 AM	Run finished at 10:34 AM
11/15/2012	10:34:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	10:39:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	10:39:05 AM	Recipe started at 10:39 AM
11/15/2012	10:39:05 AM	Helium valve closed
11/15/2012	10:39:05 AM	H2 valve closed
11/15/2012	10:39:05 AM	BCl3 valve closed
11/15/2012	10:39:05 AM	PH3 valve closed
11/15/2012	10:39:05 AM	SiCl4 pre valve closed
11/15/2012	10:39:05 AM	SiCl4 post valve closed
11/15/2012	10:39:05 AM	Main Vac valve closed
11/15/2012	10:39:05 AM	Bubbler valve closed
11/15/2012	10:39:05 AM	Bypass valve opened
11/15/2012	10:39:05 AM	Helium MFC set to  0.000000
11/15/2012	10:39:05 AM	H2 MFC set to  0.000000
11/15/2012	10:39:05 AM	BCl3 MFC set to  0.000000
11/15/2012	10:39:05 AM	PH3 MFC set to  0.000000
11/15/2012	10:39:05 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:39:05 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:39:05 AM	Tube furnace set to 0
11/15/2012	10:40:19 AM	Helium valve closed
11/15/2012	10:40:19 AM	H2 valve closed
11/15/2012	10:40:19 AM	BCl3 valve closed
11/15/2012	10:40:19 AM	PH3 valve closed
11/15/2012	10:40:19 AM	SiCl4 pre valve closed
11/15/2012	10:40:19 AM	SiCl4 post valve closed
11/15/2012	10:40:19 AM	Main Vac valve closed
11/15/2012	10:40:19 AM	Bubbler valve closed
11/15/2012	10:40:19 AM	Bypass valve opened
11/15/2012	10:40:19 AM	Helium MFC set to  0.000000
11/15/2012	10:40:19 AM	H2 MFC set to  0.000000
11/15/2012	10:40:19 AM	BCl3 MFC set to  0.000000
11/15/2012	10:40:19 AM	PH3 MFC set to  0.000000
11/15/2012	10:40:19 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:40:19 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:40:19 AM	Tube furnace set to 0
11/15/2012	10:41:19 AM	Helium valve closed
11/15/2012	10:41:19 AM	H2 valve closed
11/15/2012	10:41:19 AM	BCl3 valve closed
11/15/2012	10:41:19 AM	PH3 valve closed
11/15/2012	10:41:19 AM	SiCl4 pre valve closed
11/15/2012	10:41:19 AM	SiCl4 post valve closed
11/15/2012	10:41:19 AM	Bypass valve closed
11/15/2012	10:41:19 AM	Bubbler valve closed
11/15/2012	10:41:19 AM	Main Vac valve opened
11/15/2012	10:41:19 AM	Helium MFC set to  0.000000
11/15/2012	10:41:19 AM	H2 MFC set to  0.000000
11/15/2012	10:41:19 AM	BCl3 MFC set to  0.000000
11/15/2012	10:41:19 AM	PH3 MFC set to  0.000000
11/15/2012	10:41:19 AM	SiCl4 MFC set to  0.000000
11/15/2012	10:41:19 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	10:41:19 AM	Tube furnace set to 0
11/15/2012	10:41:20 AM	Run finished at 10:41 AM
11/15/2012	10:41:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	11:03:38 AM	Main Vac valve closed
11/15/2012	11:03:47 AM	Main Vac valve opened
11/15/2012	11:04:21 AM	Main Vac valve closed
11/15/2012	11:04:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	11:04:48 AM	Recipe started at 11:04 AM
11/15/2012	11:04:48 AM	Helium valve closed
11/15/2012	11:04:48 AM	H2 valve closed
11/15/2012	11:04:48 AM	BCl3 valve closed
11/15/2012	11:04:48 AM	PH3 valve closed
11/15/2012	11:04:48 AM	SiCl4 pre valve closed
11/15/2012	11:04:48 AM	SiCl4 post valve closed
11/15/2012	11:04:48 AM	Main Vac valve closed
11/15/2012	11:04:48 AM	Bypass valve closed
11/15/2012	11:04:48 AM	Bubbler valve closed
11/15/2012	11:04:48 AM	Helium MFC set to  0.000000
11/15/2012	11:04:48 AM	H2 MFC set to  0.000000
11/15/2012	11:04:48 AM	BCl3 MFC set to  0.000000
11/15/2012	11:04:48 AM	PH3 MFC set to  0.000000
11/15/2012	11:04:48 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:04:48 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:04:48 AM	Tube furnace set to 0
11/15/2012	11:04:51 AM	H2 valve closed
11/15/2012	11:04:51 AM	BCl3 valve closed
11/15/2012	11:04:51 AM	PH3 valve closed
11/15/2012	11:04:51 AM	SiCl4 pre valve closed
11/15/2012	11:04:51 AM	SiCl4 post valve closed
11/15/2012	11:04:51 AM	Main Vac valve closed
11/15/2012	11:04:51 AM	Bypass valve closed
11/15/2012	11:04:51 AM	Bubbler valve closed
11/15/2012	11:04:51 AM	Helium valve opened
11/15/2012	11:04:51 AM	Helium MFC set to  500.000000
11/15/2012	11:04:51 AM	H2 MFC set to  0.000000
11/15/2012	11:04:51 AM	BCl3 MFC set to  0.000000
11/15/2012	11:04:51 AM	PH3 MFC set to  0.000000
11/15/2012	11:04:51 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:04:51 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:04:51 AM	Tube furnace set to 0
11/15/2012	11:04:59 AM	Helium valve closed
11/15/2012	11:04:59 AM	H2 valve closed
11/15/2012	11:04:59 AM	BCl3 valve closed
11/15/2012	11:04:59 AM	PH3 valve closed
11/15/2012	11:04:59 AM	SiCl4 pre valve closed
11/15/2012	11:04:59 AM	SiCl4 post valve closed
11/15/2012	11:04:59 AM	Main Vac valve closed
11/15/2012	11:04:59 AM	Bypass valve closed
11/15/2012	11:04:59 AM	Bubbler valve closed
11/15/2012	11:04:59 AM	Helium MFC set to  0.000000
11/15/2012	11:04:59 AM	H2 MFC set to  0.000000
11/15/2012	11:04:59 AM	BCl3 MFC set to  0.000000
11/15/2012	11:04:59 AM	PH3 MFC set to  0.000000
11/15/2012	11:04:59 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:04:59 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:04:59 AM	Tube furnace set to 0
11/15/2012	11:05:01 AM	Run finished at 11:05 AM
11/15/2012	11:05:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	11:06:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	11:06:43 AM	Recipe started at 11:06 AM
11/15/2012	11:06:43 AM	Helium valve closed
11/15/2012	11:06:43 AM	H2 valve closed
11/15/2012	11:06:44 AM	BCl3 valve closed
11/15/2012	11:06:44 AM	PH3 valve closed
11/15/2012	11:06:44 AM	SiCl4 pre valve closed
11/15/2012	11:06:44 AM	SiCl4 post valve closed
11/15/2012	11:06:44 AM	Main Vac valve closed
11/15/2012	11:06:44 AM	Bubbler valve closed
11/15/2012	11:06:44 AM	Bypass valve opened
11/15/2012	11:06:44 AM	Helium MFC set to  0.000000
11/15/2012	11:06:44 AM	H2 MFC set to  0.000000
11/15/2012	11:06:44 AM	BCl3 MFC set to  0.000000
11/15/2012	11:06:44 AM	PH3 MFC set to  0.000000
11/15/2012	11:06:44 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:06:44 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:06:44 AM	Tube furnace set to 0
11/15/2012	11:08:14 AM	Helium valve closed
11/15/2012	11:08:14 AM	H2 valve closed
11/15/2012	11:08:14 AM	BCl3 valve closed
11/15/2012	11:08:14 AM	PH3 valve closed
11/15/2012	11:08:14 AM	SiCl4 pre valve closed
11/15/2012	11:08:14 AM	SiCl4 post valve closed
11/15/2012	11:08:14 AM	Main Vac valve closed
11/15/2012	11:08:14 AM	Bubbler valve closed
11/15/2012	11:08:14 AM	Bypass valve opened
11/15/2012	11:08:14 AM	Helium MFC set to  0.000000
11/15/2012	11:08:14 AM	H2 MFC set to  0.000000
11/15/2012	11:08:14 AM	BCl3 MFC set to  0.000000
11/15/2012	11:08:14 AM	PH3 MFC set to  0.000000
11/15/2012	11:08:14 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:08:14 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:08:14 AM	Tube furnace set to 0
11/15/2012	11:09:14 AM	Helium valve closed
11/15/2012	11:09:14 AM	H2 valve closed
11/15/2012	11:09:14 AM	BCl3 valve closed
11/15/2012	11:09:14 AM	PH3 valve closed
11/15/2012	11:09:14 AM	SiCl4 pre valve closed
11/15/2012	11:09:14 AM	SiCl4 post valve closed
11/15/2012	11:09:14 AM	Bypass valve closed
11/15/2012	11:09:14 AM	Bubbler valve closed
11/15/2012	11:09:14 AM	Main Vac valve opened
11/15/2012	11:09:14 AM	Helium MFC set to  0.000000
11/15/2012	11:09:14 AM	H2 MFC set to  0.000000
11/15/2012	11:09:14 AM	BCl3 MFC set to  0.000000
11/15/2012	11:09:14 AM	PH3 MFC set to  0.000000
11/15/2012	11:09:14 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:09:14 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:09:14 AM	Tube furnace set to 0
11/15/2012	11:09:15 AM	Run finished at 11:09 AM
11/15/2012	11:09:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	11:09:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	11:09:56 AM	Recipe started at 11:09 AM
11/15/2012	11:09:56 AM	Helium valve closed
11/15/2012	11:09:56 AM	H2 valve closed
11/15/2012	11:09:56 AM	BCl3 valve closed
11/15/2012	11:09:56 AM	PH3 valve closed
11/15/2012	11:09:56 AM	SiCl4 pre valve closed
11/15/2012	11:09:56 AM	SiCl4 post valve closed
11/15/2012	11:09:56 AM	Main Vac valve closed
11/15/2012	11:09:56 AM	Bypass valve closed
11/15/2012	11:09:56 AM	Bubbler valve closed
11/15/2012	11:09:56 AM	Helium MFC set to  0.000000
11/15/2012	11:09:56 AM	H2 MFC set to  0.000000
11/15/2012	11:09:56 AM	BCl3 MFC set to  0.000000
11/15/2012	11:09:56 AM	PH3 MFC set to  0.000000
11/15/2012	11:09:56 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:09:56 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:09:56 AM	Tube furnace set to 0
11/15/2012	11:09:59 AM	H2 valve closed
11/15/2012	11:09:59 AM	BCl3 valve closed
11/15/2012	11:09:59 AM	PH3 valve closed
11/15/2012	11:09:59 AM	SiCl4 pre valve closed
11/15/2012	11:09:59 AM	SiCl4 post valve closed
11/15/2012	11:09:59 AM	Main Vac valve closed
11/15/2012	11:09:59 AM	Bypass valve closed
11/15/2012	11:09:59 AM	Bubbler valve closed
11/15/2012	11:09:59 AM	Helium valve opened
11/15/2012	11:09:59 AM	Helium MFC set to  500.000000
11/15/2012	11:09:59 AM	H2 MFC set to  0.000000
11/15/2012	11:09:59 AM	BCl3 MFC set to  0.000000
11/15/2012	11:09:59 AM	PH3 MFC set to  0.000000
11/15/2012	11:09:59 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:09:59 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:09:59 AM	Tube furnace set to 0
11/15/2012	11:11:13 AM	Helium valve closed
11/15/2012	11:11:13 AM	H2 valve closed
11/15/2012	11:11:13 AM	BCl3 valve closed
11/15/2012	11:11:13 AM	PH3 valve closed
11/15/2012	11:11:13 AM	SiCl4 pre valve closed
11/15/2012	11:11:13 AM	SiCl4 post valve closed
11/15/2012	11:11:13 AM	Main Vac valve closed
11/15/2012	11:11:13 AM	Bypass valve closed
11/15/2012	11:11:13 AM	Bubbler valve closed
11/15/2012	11:11:13 AM	Helium MFC set to  0.000000
11/15/2012	11:11:13 AM	H2 MFC set to  0.000000
11/15/2012	11:11:13 AM	BCl3 MFC set to  0.000000
11/15/2012	11:11:13 AM	PH3 MFC set to  0.000000
11/15/2012	11:11:13 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:11:13 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:11:13 AM	Tube furnace set to 0
11/15/2012	11:11:14 AM	Run finished at 11:11 AM
11/15/2012	11:11:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	11:15:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	11:15:44 AM	Recipe started at 11:15 AM
11/15/2012	11:15:44 AM	Helium valve closed
11/15/2012	11:15:44 AM	H2 valve closed
11/15/2012	11:15:44 AM	BCl3 valve closed
11/15/2012	11:15:44 AM	PH3 valve closed
11/15/2012	11:15:44 AM	SiCl4 pre valve closed
11/15/2012	11:15:44 AM	SiCl4 post valve closed
11/15/2012	11:15:44 AM	Main Vac valve closed
11/15/2012	11:15:44 AM	Bubbler valve closed
11/15/2012	11:15:44 AM	Bypass valve opened
11/15/2012	11:15:44 AM	Helium MFC set to  0.000000
11/15/2012	11:15:44 AM	H2 MFC set to  0.000000
11/15/2012	11:15:44 AM	BCl3 MFC set to  0.000000
11/15/2012	11:15:44 AM	PH3 MFC set to  0.000000
11/15/2012	11:15:44 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:15:44 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:15:44 AM	Tube furnace set to 0
11/15/2012	11:16:59 AM	Helium valve closed
11/15/2012	11:16:59 AM	H2 valve closed
11/15/2012	11:16:59 AM	BCl3 valve closed
11/15/2012	11:16:59 AM	PH3 valve closed
11/15/2012	11:16:59 AM	SiCl4 pre valve closed
11/15/2012	11:16:59 AM	SiCl4 post valve closed
11/15/2012	11:16:59 AM	Main Vac valve closed
11/15/2012	11:16:59 AM	Bubbler valve closed
11/15/2012	11:16:59 AM	Bypass valve opened
11/15/2012	11:16:59 AM	Helium MFC set to  0.000000
11/15/2012	11:16:59 AM	H2 MFC set to  0.000000
11/15/2012	11:16:59 AM	BCl3 MFC set to  0.000000
11/15/2012	11:16:59 AM	PH3 MFC set to  0.000000
11/15/2012	11:16:59 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:16:59 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:16:59 AM	Tube furnace set to 0
11/15/2012	11:17:59 AM	Helium valve closed
11/15/2012	11:17:59 AM	H2 valve closed
11/15/2012	11:17:59 AM	BCl3 valve closed
11/15/2012	11:17:59 AM	PH3 valve closed
11/15/2012	11:17:59 AM	SiCl4 pre valve closed
11/15/2012	11:17:59 AM	SiCl4 post valve closed
11/15/2012	11:17:59 AM	Bypass valve closed
11/15/2012	11:17:59 AM	Bubbler valve closed
11/15/2012	11:17:59 AM	Main Vac valve opened
11/15/2012	11:17:59 AM	Helium MFC set to  0.000000
11/15/2012	11:17:59 AM	H2 MFC set to  0.000000
11/15/2012	11:17:59 AM	BCl3 MFC set to  0.000000
11/15/2012	11:17:59 AM	PH3 MFC set to  0.000000
11/15/2012	11:17:59 AM	SiCl4 MFC set to  0.000000
11/15/2012	11:17:59 AM	Bypass solenoid MFC set to  0.000000
11/15/2012	11:18:00 AM	Tube furnace set to 0
11/15/2012	11:18:01 AM	Run finished at 11:18 AM
11/15/2012	11:18:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	11:48:38 AM	Main Vac valve closed
11/15/2012	11:48:57 AM	Main Vac valve opened
11/15/2012	12:16:07 PM	Main Vac valve closed
11/15/2012	12:16:24 PM	Main Vac valve opened
11/15/2012	12:18:36 PM	Recipe started at 12:18 PM
11/15/2012	12:18:36 PM	Helium valve closed
11/15/2012	12:18:36 PM	H2 valve closed
11/15/2012	12:18:36 PM	BCl3 valve closed
11/15/2012	12:18:36 PM	PH3 valve closed
11/15/2012	12:18:36 PM	SiCl4 pre valve closed
11/15/2012	12:18:36 PM	SiCl4 post valve closed
11/15/2012	12:18:36 PM	Main Vac valve closed
11/15/2012	12:18:36 PM	Bypass valve closed
11/15/2012	12:18:36 PM	Bubbler valve closed
11/15/2012	12:18:36 PM	Helium MFC set to  0.000000
11/15/2012	12:18:36 PM	H2 MFC set to  0.000000
11/15/2012	12:18:36 PM	BCl3 MFC set to  0.000000
11/15/2012	12:18:36 PM	PH3 MFC set to  0.000000
11/15/2012	12:18:36 PM	SiCl4 MFC set to  0.000000
11/15/2012	12:18:36 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	12:18:36 PM	Tube furnace set to 0
11/15/2012	12:18:39 PM	Helium valve closed
11/15/2012	12:18:39 PM	BCl3 valve closed
11/15/2012	12:18:39 PM	PH3 valve closed
11/15/2012	12:18:39 PM	SiCl4 pre valve closed
11/15/2012	12:18:39 PM	SiCl4 post valve closed
11/15/2012	12:18:39 PM	Main Vac valve closed
11/15/2012	12:18:39 PM	Bypass valve closed
11/15/2012	12:18:39 PM	Bubbler valve closed
11/15/2012	12:18:39 PM	H2 valve opened
11/15/2012	12:18:39 PM	Helium MFC set to  0.000000
11/15/2012	12:18:39 PM	H2 MFC set to  500.000000
11/15/2012	12:18:39 PM	BCl3 MFC set to  0.000000
11/15/2012	12:18:39 PM	PH3 MFC set to  0.000000
11/15/2012	12:18:39 PM	SiCl4 MFC set to  0.000000
11/15/2012	12:18:39 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	12:18:39 PM	Tube furnace set to 0
11/15/2012	12:19:55 PM	Helium valve closed
11/15/2012	12:19:55 PM	BCl3 valve closed
11/15/2012	12:19:55 PM	PH3 valve closed
11/15/2012	12:19:55 PM	SiCl4 pre valve closed
11/15/2012	12:19:55 PM	SiCl4 post valve closed
11/15/2012	12:19:55 PM	Main Vac valve closed
11/15/2012	12:19:55 PM	Bypass valve closed
11/15/2012	12:19:55 PM	H2 valve opened
11/15/2012	12:19:55 PM	Bubbler valve opened
11/15/2012	12:19:55 PM	Helium MFC set to  0.000000
11/15/2012	12:19:55 PM	H2 MFC set to  500.000000
11/15/2012	12:19:55 PM	BCl3 MFC set to  0.000000
11/15/2012	12:19:55 PM	PH3 MFC set to  0.000000
11/15/2012	12:19:55 PM	SiCl4 MFC set to  0.000000
11/15/2012	12:19:55 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	12:19:55 PM	Tube furnace set to 0
11/15/2012	12:19:56 PM	Helium valve closed
11/15/2012	12:19:57 PM	BCl3 valve closed
11/15/2012	12:19:57 PM	PH3 valve closed
11/15/2012	12:19:57 PM	SiCl4 pre valve closed
11/15/2012	12:19:57 PM	SiCl4 post valve closed
11/15/2012	12:19:57 PM	Main Vac valve closed
11/15/2012	12:19:57 PM	Bypass valve closed
11/15/2012	12:19:57 PM	H2 valve opened
11/15/2012	12:19:57 PM	Bubbler valve opened
11/15/2012	12:19:57 PM	Helium MFC set to  0.000000
11/15/2012	12:19:57 PM	H2 MFC set to  500.000000
11/15/2012	12:19:57 PM	BCl3 MFC set to  0.000000
11/15/2012	12:19:57 PM	PH3 MFC set to  0.000000
11/15/2012	12:19:57 PM	SiCl4 MFC set to  0.000000
11/15/2012	12:19:57 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	12:19:57 PM	Tube furnace set to 1000
11/15/2012	12:39:57 PM	Helium valve closed
11/15/2012	12:39:57 PM	PH3 valve closed
11/15/2012	12:39:57 PM	Main Vac valve closed
11/15/2012	12:39:57 PM	Bypass valve closed
11/15/2012	12:39:57 PM	H2 valve opened
11/15/2012	12:39:57 PM	BCl3 valve opened
11/15/2012	12:39:57 PM	SiCl4 pre valve opened
11/15/2012	12:39:57 PM	SiCl4 post valve opened
11/15/2012	12:39:57 PM	Bubbler valve opened
11/15/2012	12:39:57 PM	Helium MFC set to  0.000000
11/15/2012	12:39:57 PM	H2 MFC set to  450.000000
11/15/2012	12:39:57 PM	BCl3 MFC set to  1.300000
11/15/2012	12:39:57 PM	PH3 MFC set to  0.000000
11/15/2012	12:39:57 PM	SiCl4 MFC set to  50.000000
11/15/2012	12:39:57 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	12:39:57 PM	Tube furnace set to 1000
11/15/2012	12:54:57 PM	Helium valve closed
11/15/2012	12:54:57 PM	BCl3 valve closed
11/15/2012	12:54:57 PM	PH3 valve closed
11/15/2012	12:54:57 PM	SiCl4 pre valve closed
11/15/2012	12:54:57 PM	SiCl4 post valve closed
11/15/2012	12:54:57 PM	Main Vac valve closed
11/15/2012	12:54:57 PM	Bypass valve closed
11/15/2012	12:54:57 PM	H2 valve opened
11/15/2012	12:54:57 PM	Bubbler valve opened
11/15/2012	12:54:57 PM	Helium MFC set to  0.000000
11/15/2012	12:54:57 PM	H2 MFC set to  500.000000
11/15/2012	12:54:57 PM	BCl3 MFC set to  0.000000
11/15/2012	12:54:57 PM	PH3 MFC set to  0.000000
11/15/2012	12:54:57 PM	SiCl4 MFC set to  0.000000
11/15/2012	12:54:57 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	12:54:57 PM	Tube furnace set to 900
11/15/2012	12:59:57 PM	Helium valve closed
11/15/2012	12:59:57 PM	BCl3 valve closed
11/15/2012	12:59:57 PM	PH3 valve closed
11/15/2012	12:59:57 PM	SiCl4 pre valve closed
11/15/2012	12:59:57 PM	SiCl4 post valve closed
11/15/2012	12:59:57 PM	Main Vac valve closed
11/15/2012	12:59:57 PM	Bypass valve closed
11/15/2012	12:59:57 PM	H2 valve opened
11/15/2012	12:59:57 PM	Bubbler valve opened
11/15/2012	12:59:57 PM	Helium MFC set to  0.000000
11/15/2012	12:59:57 PM	H2 MFC set to  500.000000
11/15/2012	12:59:57 PM	BCl3 MFC set to  0.000000
11/15/2012	12:59:57 PM	PH3 MFC set to  0.000000
11/15/2012	12:59:57 PM	SiCl4 MFC set to  0.000000
11/15/2012	12:59:57 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	12:59:57 PM	Tube furnace set to 800
11/15/2012	1:04:57 PM	Helium valve closed
11/15/2012	1:04:57 PM	BCl3 valve closed
11/15/2012	1:04:57 PM	PH3 valve closed
11/15/2012	1:04:57 PM	SiCl4 pre valve closed
11/15/2012	1:04:57 PM	SiCl4 post valve closed
11/15/2012	1:04:57 PM	Main Vac valve closed
11/15/2012	1:04:57 PM	Bypass valve closed
11/15/2012	1:04:57 PM	H2 valve opened
11/15/2012	1:04:57 PM	Bubbler valve opened
11/15/2012	1:04:57 PM	Helium MFC set to  0.000000
11/15/2012	1:04:57 PM	H2 MFC set to  500.000000
11/15/2012	1:04:58 PM	BCl3 MFC set to  0.000000
11/15/2012	1:04:58 PM	PH3 MFC set to  0.000000
11/15/2012	1:04:58 PM	SiCl4 MFC set to  0.000000
11/15/2012	1:04:58 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	1:04:58 PM	Tube furnace set to 700
11/15/2012	1:09:58 PM	Helium valve closed
11/15/2012	1:09:58 PM	BCl3 valve closed
11/15/2012	1:09:58 PM	PH3 valve closed
11/15/2012	1:09:58 PM	SiCl4 pre valve closed
11/15/2012	1:09:58 PM	SiCl4 post valve closed
11/15/2012	1:09:58 PM	Main Vac valve closed
11/15/2012	1:09:58 PM	Bypass valve closed
11/15/2012	1:09:58 PM	H2 valve opened
11/15/2012	1:09:58 PM	Bubbler valve opened
11/15/2012	1:09:58 PM	Helium MFC set to  0.000000
11/15/2012	1:09:58 PM	H2 MFC set to  500.000000
11/15/2012	1:09:58 PM	BCl3 MFC set to  0.000000
11/15/2012	1:09:58 PM	PH3 MFC set to  0.000000
11/15/2012	1:09:58 PM	SiCl4 MFC set to  0.000000
11/15/2012	1:09:58 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	1:09:58 PM	Tube furnace set to 600
11/15/2012	1:14:58 PM	Helium valve closed
11/15/2012	1:14:58 PM	BCl3 valve closed
11/15/2012	1:14:58 PM	PH3 valve closed
11/15/2012	1:14:58 PM	SiCl4 pre valve closed
11/15/2012	1:14:58 PM	SiCl4 post valve closed
11/15/2012	1:14:58 PM	Main Vac valve closed
11/15/2012	1:14:58 PM	Bypass valve closed
11/15/2012	1:14:58 PM	H2 valve opened
11/15/2012	1:14:58 PM	Bubbler valve opened
11/15/2012	1:14:58 PM	Helium MFC set to  0.000000
11/15/2012	1:14:58 PM	H2 MFC set to  500.000000
11/15/2012	1:14:58 PM	BCl3 MFC set to  0.000000
11/15/2012	1:14:58 PM	PH3 MFC set to  0.000000
11/15/2012	1:14:58 PM	SiCl4 MFC set to  0.000000
11/15/2012	1:14:58 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	1:14:58 PM	Tube furnace set to 500
11/15/2012	1:19:58 PM	H2 valve closed
11/15/2012	1:19:58 PM	BCl3 valve closed
11/15/2012	1:19:58 PM	PH3 valve closed
11/15/2012	1:19:58 PM	SiCl4 pre valve closed
11/15/2012	1:19:58 PM	SiCl4 post valve closed
11/15/2012	1:19:58 PM	Main Vac valve closed
11/15/2012	1:19:58 PM	Bypass valve closed
11/15/2012	1:19:58 PM	Helium valve opened
11/15/2012	1:19:58 PM	Bubbler valve opened
11/15/2012	1:19:58 PM	Helium MFC set to  500.000000
11/15/2012	1:19:58 PM	H2 MFC set to  0.000000
11/15/2012	1:19:58 PM	BCl3 MFC set to  0.000000
11/15/2012	1:19:58 PM	PH3 MFC set to  0.000000
11/15/2012	1:19:58 PM	SiCl4 MFC set to  0.000000
11/15/2012	1:19:58 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	1:19:58 PM	Tube furnace set to 0
11/15/2012	1:39:58 PM	Helium valve closed
11/15/2012	1:39:58 PM	H2 valve closed
11/15/2012	1:39:58 PM	BCl3 valve closed
11/15/2012	1:39:58 PM	PH3 valve closed
11/15/2012	1:39:58 PM	SiCl4 pre valve closed
11/15/2012	1:39:58 PM	SiCl4 post valve closed
11/15/2012	1:39:58 PM	Main Vac valve closed
11/15/2012	1:39:58 PM	Bypass valve closed
11/15/2012	1:39:58 PM	Bubbler valve closed
11/15/2012	1:39:58 PM	Helium MFC set to  0.000000
11/15/2012	1:39:58 PM	H2 MFC set to  0.000000
11/15/2012	1:39:58 PM	BCl3 MFC set to  0.000000
11/15/2012	1:39:58 PM	PH3 MFC set to  0.000000
11/15/2012	1:39:58 PM	SiCl4 MFC set to  0.000000
11/15/2012	1:39:58 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	1:39:59 PM	Tube furnace set to 0
11/15/2012	1:40:00 PM	Run finished at 1:40 PM
11/15/2012	3:06:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	3:06:33 PM	Recipe started at 3:06 PM
11/15/2012	3:06:33 PM	Helium valve closed
11/15/2012	3:06:33 PM	H2 valve closed
11/15/2012	3:06:33 PM	BCl3 valve closed
11/15/2012	3:06:33 PM	PH3 valve closed
11/15/2012	3:06:33 PM	SiCl4 pre valve closed
11/15/2012	3:06:33 PM	SiCl4 post valve closed
11/15/2012	3:06:33 PM	Main Vac valve closed
11/15/2012	3:06:33 PM	Bypass valve closed
11/15/2012	3:06:33 PM	Bubbler valve closed
11/15/2012	3:06:33 PM	Helium MFC set to  0.000000
11/15/2012	3:06:33 PM	H2 MFC set to  0.000000
11/15/2012	3:06:33 PM	BCl3 MFC set to  0.000000
11/15/2012	3:06:33 PM	PH3 MFC set to  0.000000
11/15/2012	3:06:33 PM	SiCl4 MFC set to  0.000000
11/15/2012	3:06:33 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	3:06:33 PM	Tube furnace set to 0
11/15/2012	3:06:36 PM	H2 valve closed
11/15/2012	3:06:36 PM	BCl3 valve closed
11/15/2012	3:06:37 PM	PH3 valve closed
11/15/2012	3:06:37 PM	SiCl4 pre valve closed
11/15/2012	3:06:37 PM	SiCl4 post valve closed
11/15/2012	3:06:37 PM	Main Vac valve closed
11/15/2012	3:06:37 PM	Bypass valve closed
11/15/2012	3:06:37 PM	Bubbler valve closed
11/15/2012	3:06:37 PM	Helium valve opened
11/15/2012	3:06:37 PM	Helium MFC set to  500.000000
11/15/2012	3:06:37 PM	H2 MFC set to  0.000000
11/15/2012	3:06:37 PM	BCl3 MFC set to  0.000000
11/15/2012	3:06:37 PM	PH3 MFC set to  0.000000
11/15/2012	3:06:37 PM	SiCl4 MFC set to  0.000000
11/15/2012	3:06:37 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	3:06:37 PM	Tube furnace set to 0
11/15/2012	3:06:43 PM	Helium valve closed
11/15/2012	3:06:43 PM	H2 valve closed
11/15/2012	3:06:43 PM	BCl3 valve closed
11/15/2012	3:06:43 PM	PH3 valve closed
11/15/2012	3:06:43 PM	SiCl4 pre valve closed
11/15/2012	3:06:43 PM	SiCl4 post valve closed
11/15/2012	3:06:43 PM	Main Vac valve closed
11/15/2012	3:06:43 PM	Bypass valve closed
11/15/2012	3:06:43 PM	Bubbler valve closed
11/15/2012	3:06:43 PM	Helium MFC set to  0.000000
11/15/2012	3:06:43 PM	H2 MFC set to  0.000000
11/15/2012	3:06:43 PM	BCl3 MFC set to  0.000000
11/15/2012	3:06:43 PM	PH3 MFC set to  0.000000
11/15/2012	3:06:43 PM	SiCl4 MFC set to  0.000000
11/15/2012	3:06:43 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	3:06:43 PM	Tube furnace set to 0
11/15/2012	3:06:44 PM	Run finished at 3:06 PM
11/15/2012	3:06:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	3:09:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	3:09:47 PM	Recipe started at 3:09 PM
11/15/2012	3:09:47 PM	Helium valve closed
11/15/2012	3:09:47 PM	H2 valve closed
11/15/2012	3:09:47 PM	BCl3 valve closed
11/15/2012	3:09:47 PM	PH3 valve closed
11/15/2012	3:09:47 PM	SiCl4 pre valve closed
11/15/2012	3:09:47 PM	SiCl4 post valve closed
11/15/2012	3:09:47 PM	Main Vac valve closed
11/15/2012	3:09:47 PM	Bubbler valve closed
11/15/2012	3:09:47 PM	Bypass valve opened
11/15/2012	3:09:47 PM	Helium MFC set to  0.000000
11/15/2012	3:09:47 PM	H2 MFC set to  0.000000
11/15/2012	3:09:47 PM	BCl3 MFC set to  0.000000
11/15/2012	3:09:47 PM	PH3 MFC set to  0.000000
11/15/2012	3:09:47 PM	SiCl4 MFC set to  0.000000
11/15/2012	3:09:47 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	3:09:48 PM	Tube furnace set to 0
11/15/2012	3:10:58 PM	Helium valve closed
11/15/2012	3:10:58 PM	H2 valve closed
11/15/2012	3:10:58 PM	BCl3 valve closed
11/15/2012	3:10:58 PM	PH3 valve closed
11/15/2012	3:10:58 PM	SiCl4 pre valve closed
11/15/2012	3:10:58 PM	SiCl4 post valve closed
11/15/2012	3:10:58 PM	Main Vac valve closed
11/15/2012	3:10:58 PM	Bubbler valve closed
11/15/2012	3:10:58 PM	Bypass valve opened
11/15/2012	3:10:58 PM	Helium MFC set to  0.000000
11/15/2012	3:10:58 PM	H2 MFC set to  0.000000
11/15/2012	3:10:58 PM	BCl3 MFC set to  0.000000
11/15/2012	3:10:58 PM	PH3 MFC set to  0.000000
11/15/2012	3:10:58 PM	SiCl4 MFC set to  0.000000
11/15/2012	3:10:58 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	3:10:58 PM	Tube furnace set to 0
11/15/2012	3:11:58 PM	Helium valve closed
11/15/2012	3:11:58 PM	H2 valve closed
11/15/2012	3:11:58 PM	BCl3 valve closed
11/15/2012	3:11:58 PM	PH3 valve closed
11/15/2012	3:11:58 PM	SiCl4 pre valve closed
11/15/2012	3:11:58 PM	SiCl4 post valve closed
11/15/2012	3:11:58 PM	Bypass valve closed
11/15/2012	3:11:58 PM	Bubbler valve closed
11/15/2012	3:11:58 PM	Main Vac valve opened
11/15/2012	3:11:58 PM	Helium MFC set to  0.000000
11/15/2012	3:11:58 PM	H2 MFC set to  0.000000
11/15/2012	3:11:58 PM	BCl3 MFC set to  0.000000
11/15/2012	3:11:58 PM	PH3 MFC set to  0.000000
11/15/2012	3:11:58 PM	SiCl4 MFC set to  0.000000
11/15/2012	3:11:58 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	3:11:58 PM	Tube furnace set to 0
11/15/2012	3:11:59 PM	Run finished at 3:11 PM
11/15/2012	3:11:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	3:58:00 PM	Main Vac valve closed
11/15/2012	3:58:15 PM	Main Vac valve opened
11/15/2012	3:59:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/15/2012	3:59:30 PM	Recipe started at 3:59 PM
11/15/2012	3:59:30 PM	Helium valve closed
11/15/2012	3:59:30 PM	H2 valve closed
11/15/2012	3:59:30 PM	BCl3 valve closed
11/15/2012	3:59:30 PM	PH3 valve closed
11/15/2012	3:59:30 PM	SiCl4 pre valve closed
11/15/2012	3:59:30 PM	SiCl4 post valve closed
11/15/2012	3:59:30 PM	Main Vac valve closed
11/15/2012	3:59:30 PM	Bubbler valve closed
11/15/2012	3:59:30 PM	Bypass valve opened
11/15/2012	3:59:30 PM	Helium MFC set to  0.000000
11/15/2012	3:59:30 PM	H2 MFC set to  0.000000
11/15/2012	3:59:30 PM	BCl3 MFC set to  0.000000
11/15/2012	3:59:30 PM	PH3 MFC set to  0.000000
11/15/2012	3:59:30 PM	SiCl4 MFC set to  0.000000
11/15/2012	3:59:30 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	3:59:31 PM	Tube furnace set to 0
11/15/2012	3:59:31 PM	Helium valve closed
11/15/2012	3:59:31 PM	H2 valve closed
11/15/2012	3:59:31 PM	BCl3 valve closed
11/15/2012	3:59:31 PM	PH3 valve closed
11/15/2012	3:59:31 PM	SiCl4 pre valve closed
11/15/2012	3:59:31 PM	SiCl4 post valve closed
11/15/2012	3:59:31 PM	Main Vac valve closed
11/15/2012	3:59:31 PM	Bubbler valve closed
11/15/2012	3:59:31 PM	Bypass valve opened
11/15/2012	3:59:31 PM	Helium MFC set to  0.000000
11/15/2012	3:59:31 PM	H2 MFC set to  0.000000
11/15/2012	3:59:31 PM	BCl3 MFC set to  0.000000
11/15/2012	3:59:31 PM	PH3 MFC set to  0.000000
11/15/2012	3:59:31 PM	SiCl4 MFC set to  0.000000
11/15/2012	3:59:31 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	3:59:31 PM	Tube furnace set to 0
11/15/2012	4:00:01 PM	Helium valve closed
11/15/2012	4:00:01 PM	H2 valve closed
11/15/2012	4:00:01 PM	BCl3 valve closed
11/15/2012	4:00:01 PM	PH3 valve closed
11/15/2012	4:00:01 PM	SiCl4 pre valve closed
11/15/2012	4:00:01 PM	SiCl4 post valve closed
11/15/2012	4:00:01 PM	Bypass valve closed
11/15/2012	4:00:01 PM	Bubbler valve closed
11/15/2012	4:00:01 PM	Main Vac valve opened
11/15/2012	4:00:01 PM	Helium MFC set to  0.000000
11/15/2012	4:00:01 PM	H2 MFC set to  0.000000
11/15/2012	4:00:01 PM	BCl3 MFC set to  0.000000
11/15/2012	4:00:01 PM	PH3 MFC set to  0.000000
11/15/2012	4:00:01 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:00:01 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:00:01 PM	Tube furnace set to 0
11/15/2012	4:00:31 PM	H2 valve closed
11/15/2012	4:00:31 PM	BCl3 valve closed
11/15/2012	4:00:31 PM	PH3 valve closed
11/15/2012	4:00:31 PM	SiCl4 pre valve closed
11/15/2012	4:00:31 PM	SiCl4 post valve closed
11/15/2012	4:00:31 PM	Bypass valve closed
11/15/2012	4:00:31 PM	Bubbler valve closed
11/15/2012	4:00:31 PM	Helium valve opened
11/15/2012	4:00:31 PM	Main Vac valve opened
11/15/2012	4:00:31 PM	Helium MFC set to  20.000000
11/15/2012	4:00:31 PM	H2 MFC set to  0.000000
11/15/2012	4:00:31 PM	BCl3 MFC set to  0.000000
11/15/2012	4:00:31 PM	PH3 MFC set to  0.000000
11/15/2012	4:00:31 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:00:31 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:00:32 PM	Tube furnace set to 0
11/15/2012	4:01:02 PM	Helium valve closed
11/15/2012	4:01:02 PM	H2 valve closed
11/15/2012	4:01:02 PM	BCl3 valve closed
11/15/2012	4:01:02 PM	PH3 valve closed
11/15/2012	4:01:02 PM	SiCl4 pre valve closed
11/15/2012	4:01:02 PM	SiCl4 post valve closed
11/15/2012	4:01:02 PM	Bypass valve closed
11/15/2012	4:01:02 PM	Bubbler valve closed
11/15/2012	4:01:02 PM	Main Vac valve opened
11/15/2012	4:01:02 PM	Helium MFC set to  0.000000
11/15/2012	4:01:02 PM	H2 MFC set to  0.000000
11/15/2012	4:01:02 PM	BCl3 MFC set to  0.000000
11/15/2012	4:01:02 PM	PH3 MFC set to  0.000000
11/15/2012	4:01:02 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:01:02 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:01:02 PM	Tube furnace set to 0
11/15/2012	4:01:32 PM	H2 valve closed
11/15/2012	4:01:32 PM	BCl3 valve closed
11/15/2012	4:01:32 PM	PH3 valve closed
11/15/2012	4:01:32 PM	SiCl4 pre valve closed
11/15/2012	4:01:32 PM	SiCl4 post valve closed
11/15/2012	4:01:32 PM	Bypass valve closed
11/15/2012	4:01:32 PM	Bubbler valve closed
11/15/2012	4:01:32 PM	Helium valve opened
11/15/2012	4:01:32 PM	Main Vac valve opened
11/15/2012	4:01:32 PM	Helium MFC set to  20.000000
11/15/2012	4:01:32 PM	H2 MFC set to  0.000000
11/15/2012	4:01:32 PM	BCl3 MFC set to  0.000000
11/15/2012	4:01:32 PM	PH3 MFC set to  0.000000
11/15/2012	4:01:32 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:01:32 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:01:32 PM	Tube furnace set to 0
11/15/2012	4:02:02 PM	Helium valve closed
11/15/2012	4:02:02 PM	H2 valve closed
11/15/2012	4:02:02 PM	BCl3 valve closed
11/15/2012	4:02:02 PM	PH3 valve closed
11/15/2012	4:02:02 PM	SiCl4 pre valve closed
11/15/2012	4:02:02 PM	SiCl4 post valve closed
11/15/2012	4:02:02 PM	Bypass valve closed
11/15/2012	4:02:02 PM	Bubbler valve closed
11/15/2012	4:02:02 PM	Main Vac valve opened
11/15/2012	4:02:02 PM	Helium MFC set to  0.000000
11/15/2012	4:02:02 PM	H2 MFC set to  0.000000
11/15/2012	4:02:02 PM	BCl3 MFC set to  0.000000
11/15/2012	4:02:02 PM	PH3 MFC set to  0.000000
11/15/2012	4:02:02 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:02:02 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:02:02 PM	Tube furnace set to 0
11/15/2012	4:02:32 PM	H2 valve closed
11/15/2012	4:02:32 PM	BCl3 valve closed
11/15/2012	4:02:32 PM	PH3 valve closed
11/15/2012	4:02:32 PM	SiCl4 pre valve closed
11/15/2012	4:02:32 PM	SiCl4 post valve closed
11/15/2012	4:02:32 PM	Bypass valve closed
11/15/2012	4:02:32 PM	Bubbler valve closed
11/15/2012	4:02:32 PM	Helium valve opened
11/15/2012	4:02:32 PM	Main Vac valve opened
11/15/2012	4:02:32 PM	Helium MFC set to  20.000000
11/15/2012	4:02:32 PM	H2 MFC set to  0.000000
11/15/2012	4:02:32 PM	BCl3 MFC set to  0.000000
11/15/2012	4:02:32 PM	PH3 MFC set to  0.000000
11/15/2012	4:02:32 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:02:32 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:02:33 PM	Tube furnace set to 0
11/15/2012	4:03:03 PM	Helium valve closed
11/15/2012	4:03:03 PM	H2 valve closed
11/15/2012	4:03:03 PM	BCl3 valve closed
11/15/2012	4:03:03 PM	PH3 valve closed
11/15/2012	4:03:03 PM	SiCl4 pre valve closed
11/15/2012	4:03:03 PM	SiCl4 post valve closed
11/15/2012	4:03:03 PM	Bypass valve closed
11/15/2012	4:03:03 PM	Bubbler valve closed
11/15/2012	4:03:03 PM	Main Vac valve opened
11/15/2012	4:03:03 PM	Helium MFC set to  0.000000
11/15/2012	4:03:03 PM	H2 MFC set to  0.000000
11/15/2012	4:03:03 PM	BCl3 MFC set to  0.000000
11/15/2012	4:03:03 PM	PH3 MFC set to  0.000000
11/15/2012	4:03:03 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:03:03 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:03:03 PM	Tube furnace set to 0
11/15/2012	4:03:33 PM	H2 valve closed
11/15/2012	4:03:33 PM	BCl3 valve closed
11/15/2012	4:03:33 PM	PH3 valve closed
11/15/2012	4:03:33 PM	SiCl4 pre valve closed
11/15/2012	4:03:33 PM	SiCl4 post valve closed
11/15/2012	4:03:33 PM	Bypass valve closed
11/15/2012	4:03:33 PM	Bubbler valve closed
11/15/2012	4:03:33 PM	Helium valve opened
11/15/2012	4:03:33 PM	Main Vac valve opened
11/15/2012	4:03:33 PM	Helium MFC set to  20.000000
11/15/2012	4:03:33 PM	H2 MFC set to  0.000000
11/15/2012	4:03:33 PM	BCl3 MFC set to  0.000000
11/15/2012	4:03:33 PM	PH3 MFC set to  0.000000
11/15/2012	4:03:33 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:03:33 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:03:33 PM	Tube furnace set to 0
11/15/2012	4:04:03 PM	Helium valve closed
11/15/2012	4:04:03 PM	H2 valve closed
11/15/2012	4:04:03 PM	BCl3 valve closed
11/15/2012	4:04:03 PM	PH3 valve closed
11/15/2012	4:04:03 PM	SiCl4 pre valve closed
11/15/2012	4:04:03 PM	SiCl4 post valve closed
11/15/2012	4:04:03 PM	Bypass valve closed
11/15/2012	4:04:03 PM	Bubbler valve closed
11/15/2012	4:04:03 PM	Main Vac valve opened
11/15/2012	4:04:03 PM	Helium MFC set to  0.000000
11/15/2012	4:04:03 PM	H2 MFC set to  0.000000
11/15/2012	4:04:03 PM	BCl3 MFC set to  0.000000
11/15/2012	4:04:03 PM	PH3 MFC set to  0.000000
11/15/2012	4:04:03 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:04:03 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:04:03 PM	Tube furnace set to 0
11/15/2012	4:04:33 PM	H2 valve closed
11/15/2012	4:04:33 PM	BCl3 valve closed
11/15/2012	4:04:33 PM	PH3 valve closed
11/15/2012	4:04:33 PM	SiCl4 pre valve closed
11/15/2012	4:04:33 PM	SiCl4 post valve closed
11/15/2012	4:04:33 PM	Bypass valve closed
11/15/2012	4:04:33 PM	Bubbler valve closed
11/15/2012	4:04:33 PM	Helium valve opened
11/15/2012	4:04:33 PM	Main Vac valve opened
11/15/2012	4:04:33 PM	Helium MFC set to  20.000000
11/15/2012	4:04:33 PM	H2 MFC set to  0.000000
11/15/2012	4:04:33 PM	BCl3 MFC set to  0.000000
11/15/2012	4:04:33 PM	PH3 MFC set to  0.000000
11/15/2012	4:04:33 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:04:33 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:04:33 PM	Tube furnace set to 0
11/15/2012	4:05:04 PM	Helium valve closed
11/15/2012	4:05:04 PM	H2 valve closed
11/15/2012	4:05:04 PM	BCl3 valve closed
11/15/2012	4:05:04 PM	PH3 valve closed
11/15/2012	4:05:04 PM	SiCl4 pre valve closed
11/15/2012	4:05:04 PM	SiCl4 post valve closed
11/15/2012	4:05:04 PM	Bypass valve closed
11/15/2012	4:05:04 PM	Bubbler valve closed
11/15/2012	4:05:04 PM	Main Vac valve opened
11/15/2012	4:05:04 PM	Helium MFC set to  0.000000
11/15/2012	4:05:04 PM	H2 MFC set to  0.000000
11/15/2012	4:05:04 PM	BCl3 MFC set to  0.000000
11/15/2012	4:05:04 PM	PH3 MFC set to  0.000000
11/15/2012	4:05:04 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:05:04 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:05:04 PM	Tube furnace set to 0
11/15/2012	4:05:34 PM	H2 valve closed
11/15/2012	4:05:34 PM	BCl3 valve closed
11/15/2012	4:05:34 PM	PH3 valve closed
11/15/2012	4:05:34 PM	SiCl4 pre valve closed
11/15/2012	4:05:34 PM	SiCl4 post valve closed
11/15/2012	4:05:34 PM	Bypass valve closed
11/15/2012	4:05:34 PM	Bubbler valve closed
11/15/2012	4:05:34 PM	Helium valve opened
11/15/2012	4:05:34 PM	Main Vac valve opened
11/15/2012	4:05:34 PM	Helium MFC set to  20.000000
11/15/2012	4:05:34 PM	H2 MFC set to  0.000000
11/15/2012	4:05:34 PM	BCl3 MFC set to  0.000000
11/15/2012	4:05:34 PM	PH3 MFC set to  0.000000
11/15/2012	4:05:34 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:05:34 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:05:34 PM	Tube furnace set to 0
11/15/2012	4:06:04 PM	Helium valve closed
11/15/2012	4:06:04 PM	H2 valve closed
11/15/2012	4:06:04 PM	BCl3 valve closed
11/15/2012	4:06:04 PM	PH3 valve closed
11/15/2012	4:06:04 PM	SiCl4 pre valve closed
11/15/2012	4:06:04 PM	SiCl4 post valve closed
11/15/2012	4:06:04 PM	Bypass valve closed
11/15/2012	4:06:04 PM	Bubbler valve closed
11/15/2012	4:06:04 PM	Main Vac valve opened
11/15/2012	4:06:04 PM	Helium MFC set to  0.000000
11/15/2012	4:06:04 PM	H2 MFC set to  0.000000
11/15/2012	4:06:04 PM	BCl3 MFC set to  0.000000
11/15/2012	4:06:04 PM	PH3 MFC set to  0.000000
11/15/2012	4:06:04 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:06:04 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:06:04 PM	Tube furnace set to 0
11/15/2012	4:06:34 PM	H2 valve closed
11/15/2012	4:06:34 PM	BCl3 valve closed
11/15/2012	4:06:34 PM	PH3 valve closed
11/15/2012	4:06:34 PM	SiCl4 pre valve closed
11/15/2012	4:06:34 PM	SiCl4 post valve closed
11/15/2012	4:06:34 PM	Bypass valve closed
11/15/2012	4:06:34 PM	Bubbler valve closed
11/15/2012	4:06:34 PM	Helium valve opened
11/15/2012	4:06:34 PM	Main Vac valve opened
11/15/2012	4:06:34 PM	Helium MFC set to  20.000000
11/15/2012	4:06:34 PM	H2 MFC set to  0.000000
11/15/2012	4:06:34 PM	BCl3 MFC set to  0.000000
11/15/2012	4:06:34 PM	PH3 MFC set to  0.000000
11/15/2012	4:06:34 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:06:34 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:06:34 PM	Tube furnace set to 0
11/15/2012	4:07:04 PM	Helium valve closed
11/15/2012	4:07:04 PM	H2 valve closed
11/15/2012	4:07:04 PM	BCl3 valve closed
11/15/2012	4:07:04 PM	PH3 valve closed
11/15/2012	4:07:05 PM	SiCl4 pre valve closed
11/15/2012	4:07:05 PM	SiCl4 post valve closed
11/15/2012	4:07:05 PM	Bypass valve closed
11/15/2012	4:07:05 PM	Bubbler valve closed
11/15/2012	4:07:05 PM	Main Vac valve opened
11/15/2012	4:07:05 PM	Helium MFC set to  0.000000
11/15/2012	4:07:05 PM	H2 MFC set to  0.000000
11/15/2012	4:07:05 PM	BCl3 MFC set to  0.000000
11/15/2012	4:07:05 PM	PH3 MFC set to  0.000000
11/15/2012	4:07:05 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:07:05 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:07:05 PM	Tube furnace set to 0
11/15/2012	4:07:35 PM	H2 valve closed
11/15/2012	4:07:35 PM	BCl3 valve closed
11/15/2012	4:07:35 PM	PH3 valve closed
11/15/2012	4:07:35 PM	SiCl4 pre valve closed
11/15/2012	4:07:35 PM	SiCl4 post valve closed
11/15/2012	4:07:35 PM	Bypass valve closed
11/15/2012	4:07:35 PM	Bubbler valve closed
11/15/2012	4:07:35 PM	Helium valve opened
11/15/2012	4:07:35 PM	Main Vac valve opened
11/15/2012	4:07:35 PM	Helium MFC set to  20.000000
11/15/2012	4:07:35 PM	H2 MFC set to  0.000000
11/15/2012	4:07:35 PM	BCl3 MFC set to  0.000000
11/15/2012	4:07:35 PM	PH3 MFC set to  0.000000
11/15/2012	4:07:35 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:07:35 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:07:35 PM	Tube furnace set to 0
11/15/2012	4:08:05 PM	Helium valve closed
11/15/2012	4:08:05 PM	H2 valve closed
11/15/2012	4:08:05 PM	BCl3 valve closed
11/15/2012	4:08:05 PM	PH3 valve closed
11/15/2012	4:08:05 PM	SiCl4 pre valve closed
11/15/2012	4:08:05 PM	SiCl4 post valve closed
11/15/2012	4:08:05 PM	Bypass valve closed
11/15/2012	4:08:05 PM	Bubbler valve closed
11/15/2012	4:08:05 PM	Main Vac valve opened
11/15/2012	4:08:05 PM	Helium MFC set to  0.000000
11/15/2012	4:08:05 PM	H2 MFC set to  0.000000
11/15/2012	4:08:05 PM	BCl3 MFC set to  0.000000
11/15/2012	4:08:05 PM	PH3 MFC set to  0.000000
11/15/2012	4:08:05 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:08:05 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:08:05 PM	Tube furnace set to 0
11/15/2012	4:08:35 PM	H2 valve closed
11/15/2012	4:08:35 PM	BCl3 valve closed
11/15/2012	4:08:35 PM	PH3 valve closed
11/15/2012	4:08:35 PM	SiCl4 pre valve closed
11/15/2012	4:08:35 PM	SiCl4 post valve closed
11/15/2012	4:08:35 PM	Bypass valve closed
11/15/2012	4:08:35 PM	Bubbler valve closed
11/15/2012	4:08:35 PM	Helium valve opened
11/15/2012	4:08:35 PM	Main Vac valve opened
11/15/2012	4:08:35 PM	Helium MFC set to  20.000000
11/15/2012	4:08:35 PM	H2 MFC set to  0.000000
11/15/2012	4:08:35 PM	BCl3 MFC set to  0.000000
11/15/2012	4:08:35 PM	PH3 MFC set to  0.000000
11/15/2012	4:08:35 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:08:35 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:08:35 PM	Tube furnace set to 0
11/15/2012	4:09:05 PM	Helium valve closed
11/15/2012	4:09:05 PM	H2 valve closed
11/15/2012	4:09:05 PM	BCl3 valve closed
11/15/2012	4:09:05 PM	PH3 valve closed
11/15/2012	4:09:05 PM	SiCl4 pre valve closed
11/15/2012	4:09:05 PM	SiCl4 post valve closed
11/15/2012	4:09:05 PM	Bypass valve closed
11/15/2012	4:09:05 PM	Bubbler valve closed
11/15/2012	4:09:05 PM	Main Vac valve opened
11/15/2012	4:09:06 PM	Helium MFC set to  0.000000
11/15/2012	4:09:06 PM	H2 MFC set to  0.000000
11/15/2012	4:09:06 PM	BCl3 MFC set to  0.000000
11/15/2012	4:09:06 PM	PH3 MFC set to  0.000000
11/15/2012	4:09:06 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:09:06 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:09:06 PM	Tube furnace set to 0
11/15/2012	4:09:36 PM	H2 valve closed
11/15/2012	4:09:36 PM	BCl3 valve closed
11/15/2012	4:09:36 PM	PH3 valve closed
11/15/2012	4:09:36 PM	SiCl4 pre valve closed
11/15/2012	4:09:36 PM	SiCl4 post valve closed
11/15/2012	4:09:36 PM	Bypass valve closed
11/15/2012	4:09:36 PM	Bubbler valve closed
11/15/2012	4:09:36 PM	Helium valve opened
11/15/2012	4:09:36 PM	Main Vac valve opened
11/15/2012	4:09:36 PM	Helium MFC set to  20.000000
11/15/2012	4:09:36 PM	H2 MFC set to  0.000000
11/15/2012	4:09:36 PM	BCl3 MFC set to  0.000000
11/15/2012	4:09:36 PM	PH3 MFC set to  0.000000
11/15/2012	4:09:36 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:09:36 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:09:36 PM	Tube furnace set to 0
11/15/2012	4:10:06 PM	Helium valve closed
11/15/2012	4:10:06 PM	H2 valve closed
11/15/2012	4:10:06 PM	BCl3 valve closed
11/15/2012	4:10:06 PM	PH3 valve closed
11/15/2012	4:10:06 PM	SiCl4 pre valve closed
11/15/2012	4:10:06 PM	SiCl4 post valve closed
11/15/2012	4:10:06 PM	Bypass valve closed
11/15/2012	4:10:06 PM	Bubbler valve closed
11/15/2012	4:10:06 PM	Main Vac valve opened
11/15/2012	4:10:06 PM	Helium MFC set to  0.000000
11/15/2012	4:10:06 PM	H2 MFC set to  0.000000
11/15/2012	4:10:06 PM	BCl3 MFC set to  0.000000
11/15/2012	4:10:06 PM	PH3 MFC set to  0.000000
11/15/2012	4:10:06 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:10:06 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:10:06 PM	Tube furnace set to 0
11/15/2012	4:10:07 PM	Run finished at 4:10 PM
11/15/2012	4:10:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/15/2012	4:10:36 PM	Main Vac valve closed
11/15/2012	4:10:48 PM	Main Vac valve opened
11/15/2012	4:14:29 PM	Recipe started at 4:14 PM
11/15/2012	4:14:29 PM	Helium valve closed
11/15/2012	4:14:29 PM	H2 valve closed
11/15/2012	4:14:29 PM	BCl3 valve closed
11/15/2012	4:14:29 PM	PH3 valve closed
11/15/2012	4:14:29 PM	SiCl4 pre valve closed
11/15/2012	4:14:29 PM	SiCl4 post valve closed
11/15/2012	4:14:29 PM	Main Vac valve closed
11/15/2012	4:14:29 PM	Bypass valve closed
11/15/2012	4:14:29 PM	Bubbler valve closed
11/15/2012	4:14:29 PM	Helium MFC set to  0.000000
11/15/2012	4:14:29 PM	H2 MFC set to  0.000000
11/15/2012	4:14:29 PM	BCl3 MFC set to  0.000000
11/15/2012	4:14:29 PM	PH3 MFC set to  0.000000
11/15/2012	4:14:29 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:14:29 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:14:29 PM	Tube furnace set to 0
11/15/2012	4:14:32 PM	Helium valve closed
11/15/2012	4:14:32 PM	BCl3 valve closed
11/15/2012	4:14:32 PM	PH3 valve closed
11/15/2012	4:14:32 PM	SiCl4 pre valve closed
11/15/2012	4:14:32 PM	SiCl4 post valve closed
11/15/2012	4:14:32 PM	Main Vac valve closed
11/15/2012	4:14:32 PM	Bypass valve closed
11/15/2012	4:14:32 PM	Bubbler valve closed
11/15/2012	4:14:32 PM	H2 valve opened
11/15/2012	4:14:32 PM	Helium MFC set to  0.000000
11/15/2012	4:14:32 PM	H2 MFC set to  500.000000
11/15/2012	4:14:32 PM	BCl3 MFC set to  0.000000
11/15/2012	4:14:32 PM	PH3 MFC set to  0.000000
11/15/2012	4:14:32 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:14:32 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:14:33 PM	Tube furnace set to 0
11/15/2012	4:15:48 PM	Helium valve closed
11/15/2012	4:15:48 PM	BCl3 valve closed
11/15/2012	4:15:48 PM	PH3 valve closed
11/15/2012	4:15:48 PM	SiCl4 pre valve closed
11/15/2012	4:15:48 PM	SiCl4 post valve closed
11/15/2012	4:15:48 PM	Main Vac valve closed
11/15/2012	4:15:48 PM	Bypass valve closed
11/15/2012	4:15:48 PM	H2 valve opened
11/15/2012	4:15:48 PM	Bubbler valve opened
11/15/2012	4:15:48 PM	Helium MFC set to  0.000000
11/15/2012	4:15:48 PM	H2 MFC set to  500.000000
11/15/2012	4:15:48 PM	BCl3 MFC set to  0.000000
11/15/2012	4:15:48 PM	PH3 MFC set to  0.000000
11/15/2012	4:15:48 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:15:48 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:15:48 PM	Tube furnace set to 0
11/15/2012	4:15:49 PM	Helium valve closed
11/15/2012	4:15:49 PM	BCl3 valve closed
11/15/2012	4:15:49 PM	PH3 valve closed
11/15/2012	4:15:49 PM	SiCl4 pre valve closed
11/15/2012	4:15:49 PM	SiCl4 post valve closed
11/15/2012	4:15:49 PM	Main Vac valve closed
11/15/2012	4:15:49 PM	Bypass valve closed
11/15/2012	4:15:49 PM	H2 valve opened
11/15/2012	4:15:49 PM	Bubbler valve opened
11/15/2012	4:15:49 PM	Helium MFC set to  0.000000
11/15/2012	4:15:49 PM	H2 MFC set to  500.000000
11/15/2012	4:15:49 PM	BCl3 MFC set to  0.000000
11/15/2012	4:15:49 PM	PH3 MFC set to  0.000000
11/15/2012	4:15:49 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:15:49 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:15:49 PM	Tube furnace set to 1000
11/15/2012	4:35:49 PM	Helium valve closed
11/15/2012	4:35:49 PM	PH3 valve closed
11/15/2012	4:35:49 PM	Main Vac valve closed
11/15/2012	4:35:49 PM	Bypass valve closed
11/15/2012	4:35:49 PM	H2 valve opened
11/15/2012	4:35:49 PM	BCl3 valve opened
11/15/2012	4:35:49 PM	SiCl4 pre valve opened
11/15/2012	4:35:49 PM	SiCl4 post valve opened
11/15/2012	4:35:49 PM	Bubbler valve opened
11/15/2012	4:35:49 PM	Helium MFC set to  0.000000
11/15/2012	4:35:49 PM	H2 MFC set to  450.000000
11/15/2012	4:35:49 PM	BCl3 MFC set to  1.300000
11/15/2012	4:35:49 PM	PH3 MFC set to  0.000000
11/15/2012	4:35:49 PM	SiCl4 MFC set to  50.000000
11/15/2012	4:35:49 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:35:49 PM	Tube furnace set to 1000
11/15/2012	4:47:49 PM	Helium valve closed
11/15/2012	4:47:49 PM	BCl3 valve closed
11/15/2012	4:47:49 PM	PH3 valve closed
11/15/2012	4:47:49 PM	SiCl4 pre valve closed
11/15/2012	4:47:49 PM	SiCl4 post valve closed
11/15/2012	4:47:49 PM	Main Vac valve closed
11/15/2012	4:47:49 PM	Bypass valve closed
11/15/2012	4:47:49 PM	H2 valve opened
11/15/2012	4:47:49 PM	Bubbler valve opened
11/15/2012	4:47:49 PM	Helium MFC set to  0.000000
11/15/2012	4:47:49 PM	H2 MFC set to  500.000000
11/15/2012	4:47:49 PM	BCl3 MFC set to  0.000000
11/15/2012	4:47:49 PM	PH3 MFC set to  0.000000
11/15/2012	4:47:49 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:47:49 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:47:49 PM	Tube furnace set to 1000
11/15/2012	4:52:49 PM	Helium valve closed
11/15/2012	4:52:49 PM	BCl3 valve closed
11/15/2012	4:52:49 PM	PH3 valve closed
11/15/2012	4:52:49 PM	SiCl4 pre valve closed
11/15/2012	4:52:49 PM	SiCl4 post valve closed
11/15/2012	4:52:49 PM	Main Vac valve closed
11/15/2012	4:52:49 PM	Bypass valve closed
11/15/2012	4:52:49 PM	H2 valve opened
11/15/2012	4:52:49 PM	Bubbler valve opened
11/15/2012	4:52:49 PM	Helium MFC set to  0.000000
11/15/2012	4:52:49 PM	H2 MFC set to  500.000000
11/15/2012	4:52:49 PM	BCl3 MFC set to  0.000000
11/15/2012	4:52:49 PM	PH3 MFC set to  0.000000
11/15/2012	4:52:49 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:52:49 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:52:50 PM	Tube furnace set to 900
11/15/2012	4:57:50 PM	Helium valve closed
11/15/2012	4:57:50 PM	BCl3 valve closed
11/15/2012	4:57:50 PM	PH3 valve closed
11/15/2012	4:57:50 PM	SiCl4 pre valve closed
11/15/2012	4:57:50 PM	SiCl4 post valve closed
11/15/2012	4:57:50 PM	Main Vac valve closed
11/15/2012	4:57:50 PM	Bypass valve closed
11/15/2012	4:57:50 PM	H2 valve opened
11/15/2012	4:57:50 PM	Bubbler valve opened
11/15/2012	4:57:50 PM	Helium MFC set to  0.000000
11/15/2012	4:57:50 PM	H2 MFC set to  500.000000
11/15/2012	4:57:50 PM	BCl3 MFC set to  0.000000
11/15/2012	4:57:50 PM	PH3 MFC set to  0.000000
11/15/2012	4:57:50 PM	SiCl4 MFC set to  0.000000
11/15/2012	4:57:50 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	4:57:50 PM	Tube furnace set to 800
11/15/2012	5:02:50 PM	Helium valve closed
11/15/2012	5:02:50 PM	BCl3 valve closed
11/15/2012	5:02:50 PM	PH3 valve closed
11/15/2012	5:02:50 PM	SiCl4 pre valve closed
11/15/2012	5:02:50 PM	SiCl4 post valve closed
11/15/2012	5:02:50 PM	Main Vac valve closed
11/15/2012	5:02:50 PM	Bypass valve closed
11/15/2012	5:02:50 PM	H2 valve opened
11/15/2012	5:02:50 PM	Bubbler valve opened
11/15/2012	5:02:50 PM	Helium MFC set to  0.000000
11/15/2012	5:02:50 PM	H2 MFC set to  500.000000
11/15/2012	5:02:50 PM	BCl3 MFC set to  0.000000
11/15/2012	5:02:50 PM	PH3 MFC set to  0.000000
11/15/2012	5:02:50 PM	SiCl4 MFC set to  0.000000
11/15/2012	5:02:50 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	5:02:50 PM	Tube furnace set to 700
11/15/2012	5:07:50 PM	H2 valve closed
11/15/2012	5:07:50 PM	BCl3 valve closed
11/15/2012	5:07:50 PM	PH3 valve closed
11/15/2012	5:07:50 PM	SiCl4 pre valve closed
11/15/2012	5:07:50 PM	SiCl4 post valve closed
11/15/2012	5:07:50 PM	Main Vac valve closed
11/15/2012	5:07:50 PM	Bypass valve closed
11/15/2012	5:07:50 PM	Helium valve opened
11/15/2012	5:07:50 PM	Bubbler valve opened
11/15/2012	5:07:50 PM	Helium MFC set to  500.000000
11/15/2012	5:07:50 PM	H2 MFC set to  0.000000
11/15/2012	5:07:50 PM	BCl3 MFC set to  0.000000
11/15/2012	5:07:50 PM	PH3 MFC set to  0.000000
11/15/2012	5:07:50 PM	SiCl4 MFC set to  0.000000
11/15/2012	5:07:50 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	5:07:50 PM	Tube furnace set to 0
11/15/2012	5:27:50 PM	Helium valve closed
11/15/2012	5:27:50 PM	H2 valve closed
11/15/2012	5:27:50 PM	BCl3 valve closed
11/15/2012	5:27:50 PM	PH3 valve closed
11/15/2012	5:27:50 PM	SiCl4 pre valve closed
11/15/2012	5:27:50 PM	SiCl4 post valve closed
11/15/2012	5:27:50 PM	Main Vac valve closed
11/15/2012	5:27:50 PM	Bypass valve closed
11/15/2012	5:27:50 PM	Bubbler valve closed
11/15/2012	5:27:50 PM	Helium MFC set to  0.000000
11/15/2012	5:27:50 PM	H2 MFC set to  0.000000
11/15/2012	5:27:50 PM	BCl3 MFC set to  0.000000
11/15/2012	5:27:50 PM	PH3 MFC set to  0.000000
11/15/2012	5:27:50 PM	SiCl4 MFC set to  0.000000
11/15/2012	5:27:50 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	5:27:51 PM	Tube furnace set to 0
11/15/2012	5:27:52 PM	Run finished at 5:27 PM
11/15/2012	5:50:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	5:50:47 PM	Recipe started at 5:50 PM
11/15/2012	5:50:47 PM	Helium valve closed
11/15/2012	5:50:47 PM	H2 valve closed
11/15/2012	5:50:47 PM	BCl3 valve closed
11/15/2012	5:50:47 PM	PH3 valve closed
11/15/2012	5:50:47 PM	SiCl4 pre valve closed
11/15/2012	5:50:47 PM	SiCl4 post valve closed
11/15/2012	5:50:47 PM	Main Vac valve closed
11/15/2012	5:50:47 PM	Bypass valve closed
11/15/2012	5:50:47 PM	Bubbler valve closed
11/15/2012	5:50:47 PM	Helium MFC set to  0.000000
11/15/2012	5:50:47 PM	H2 MFC set to  0.000000
11/15/2012	5:50:47 PM	BCl3 MFC set to  0.000000
11/15/2012	5:50:47 PM	PH3 MFC set to  0.000000
11/15/2012	5:50:47 PM	SiCl4 MFC set to  0.000000
11/15/2012	5:50:47 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	5:50:47 PM	Tube furnace set to 0
11/15/2012	5:50:50 PM	H2 valve closed
11/15/2012	5:50:50 PM	BCl3 valve closed
11/15/2012	5:50:50 PM	PH3 valve closed
11/15/2012	5:50:50 PM	SiCl4 pre valve closed
11/15/2012	5:50:50 PM	SiCl4 post valve closed
11/15/2012	5:50:50 PM	Main Vac valve closed
11/15/2012	5:50:50 PM	Bypass valve closed
11/15/2012	5:50:50 PM	Bubbler valve closed
11/15/2012	5:50:50 PM	Helium valve opened
11/15/2012	5:50:50 PM	Helium MFC set to  500.000000
11/15/2012	5:50:50 PM	H2 MFC set to  0.000000
11/15/2012	5:50:50 PM	BCl3 MFC set to  0.000000
11/15/2012	5:50:50 PM	PH3 MFC set to  0.000000
11/15/2012	5:50:50 PM	SiCl4 MFC set to  0.000000
11/15/2012	5:50:50 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	5:50:50 PM	Tube furnace set to 0
11/15/2012	5:50:56 PM	Helium valve closed
11/15/2012	5:50:56 PM	H2 valve closed
11/15/2012	5:50:56 PM	BCl3 valve closed
11/15/2012	5:50:56 PM	PH3 valve closed
11/15/2012	5:50:56 PM	SiCl4 pre valve closed
11/15/2012	5:50:56 PM	SiCl4 post valve closed
11/15/2012	5:50:56 PM	Main Vac valve closed
11/15/2012	5:50:56 PM	Bypass valve closed
11/15/2012	5:50:56 PM	Bubbler valve closed
11/15/2012	5:50:56 PM	Helium MFC set to  0.000000
11/15/2012	5:50:56 PM	H2 MFC set to  0.000000
11/15/2012	5:50:56 PM	BCl3 MFC set to  0.000000
11/15/2012	5:50:56 PM	PH3 MFC set to  0.000000
11/15/2012	5:50:56 PM	SiCl4 MFC set to  0.000000
11/15/2012	5:50:56 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	5:50:56 PM	Tube furnace set to 0
11/15/2012	5:50:57 PM	Run finished at 5:50 PM
11/15/2012	5:50:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/15/2012	5:52:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2012	5:52:53 PM	Recipe started at 5:52 PM
11/15/2012	5:52:53 PM	Helium valve closed
11/15/2012	5:52:53 PM	H2 valve closed
11/15/2012	5:52:53 PM	BCl3 valve closed
11/15/2012	5:52:53 PM	PH3 valve closed
11/15/2012	5:52:53 PM	SiCl4 pre valve closed
11/15/2012	5:52:53 PM	SiCl4 post valve closed
11/15/2012	5:52:53 PM	Main Vac valve closed
11/15/2012	5:52:53 PM	Bubbler valve closed
11/15/2012	5:52:53 PM	Bypass valve opened
11/15/2012	5:52:53 PM	Helium MFC set to  0.000000
11/15/2012	5:52:53 PM	H2 MFC set to  0.000000
11/15/2012	5:52:53 PM	BCl3 MFC set to  0.000000
11/15/2012	5:52:53 PM	PH3 MFC set to  0.000000
11/15/2012	5:52:53 PM	SiCl4 MFC set to  0.000000
11/15/2012	5:52:53 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	5:52:53 PM	Tube furnace set to 0
11/15/2012	5:54:04 PM	Helium valve closed
11/15/2012	5:54:04 PM	H2 valve closed
11/15/2012	5:54:04 PM	BCl3 valve closed
11/15/2012	5:54:04 PM	PH3 valve closed
11/15/2012	5:54:04 PM	SiCl4 pre valve closed
11/15/2012	5:54:04 PM	SiCl4 post valve closed
11/15/2012	5:54:04 PM	Main Vac valve closed
11/15/2012	5:54:04 PM	Bubbler valve closed
11/15/2012	5:54:04 PM	Bypass valve opened
11/15/2012	5:54:04 PM	Helium MFC set to  0.000000
11/15/2012	5:54:04 PM	H2 MFC set to  0.000000
11/15/2012	5:54:04 PM	BCl3 MFC set to  0.000000
11/15/2012	5:54:04 PM	PH3 MFC set to  0.000000
11/15/2012	5:54:04 PM	SiCl4 MFC set to  0.000000
11/15/2012	5:54:04 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	5:54:04 PM	Tube furnace set to 0
11/15/2012	5:55:04 PM	Helium valve closed
11/15/2012	5:55:04 PM	H2 valve closed
11/15/2012	5:55:04 PM	BCl3 valve closed
11/15/2012	5:55:04 PM	PH3 valve closed
11/15/2012	5:55:04 PM	SiCl4 pre valve closed
11/15/2012	5:55:04 PM	SiCl4 post valve closed
11/15/2012	5:55:04 PM	Bypass valve closed
11/15/2012	5:55:04 PM	Bubbler valve closed
11/15/2012	5:55:04 PM	Main Vac valve opened
11/15/2012	5:55:04 PM	Helium MFC set to  0.000000
11/15/2012	5:55:04 PM	H2 MFC set to  0.000000
11/15/2012	5:55:04 PM	BCl3 MFC set to  0.000000
11/15/2012	5:55:04 PM	PH3 MFC set to  0.000000
11/15/2012	5:55:04 PM	SiCl4 MFC set to  0.000000
11/15/2012	5:55:04 PM	Bypass solenoid MFC set to  0.000000
11/15/2012	5:55:04 PM	Tube furnace set to 0
11/15/2012	5:55:05 PM	Run finished at 5:55 PM
11/15/2012	5:55:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
